Event Status
Scheduled
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Thrust Project No. P-1F: WS Nanofabrication of Advanced CMOS Logic Devices |
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Related Testbed(s): WS Nanoshape Imprinting Testbed; and WS Metal Assisted Chemical Etching Testbed |
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P-2A.1-S |
Wafer-scale and R2R Optical Scatterometry |
Juan Faria |
Steve Brueck |
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P-2A.3-S |
Large Area Photonic Device Functional Nanometrology |
Brian Gawlik |
S.V. Sreenivasan |
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P-2A.4-T |
Metrology of Nanostructured Patterns using Liquid Drop Dynamics |
Xuemei Wang |
Steve Brueck |