• Roll-to-Roll Nanofabrication Test Bed—2D and 3D nanosculpting on R2R flexible substrates, high-speed solvent-less R2R graphene transfer, R2R thin film coatings with nano-scale thicknesses, R2R printable nanomaterials, and in-line nanometrology.
    • Flex Crystalline Nanofabrication Test Bed—Flexible crystalline substrates exfoliated from bulk wafers, wafer-scale 2D and 3D nanosculpting with unprecedented control in size and shape of patterns, and in-line nanometrology.


    • Thrust 1: Patterning—Top-down fabrication of nano-scale structures with exquisite control of feature size and shape.
    • Thrust 2: Functional Materials—Processable materials for devices and machines, including directed self-assembly of block co-polymers and nanoparticles.
    • Thrust 3: Metrology & Yield Enhancement—Sub-wavelength optical nanometrology for real-time nanomanufacturing feedback and fault diagnostics, validated uncertainty quantification (UQ) models for scale-up and process control.


    Flex Crystalline Nanofabrication Test Bed

    • Novel high-density STT-RAM with potential for >5x storage capacity as compared to ITRS 2022
    • Flex Si Supercapacitors
    • Flex Si PV

    Roll-to-Roll Nanofabrication Test Bed

    • Flex THz Transceiver
    • Photonics for Flex Displays
    • Bio-Nanocarrier for Drug Delivery