We are alternating between the Process and Metrology & Yield Enhancement thrusts and so the following persons will be presenting:
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Thrust Project No. P-2A: R2R Optical Metrology for Nanopatterned Substrates |
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Related Testbed(s): WS and R2R Optical Scatterometry; Sub Wavelength Resolution Optical Microscopy |
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Sub-project numbers |
Sub-project title |
Primary Student(s) or Postdoc(s) |
Supervising professor(s) |
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P-2A.1-S |
Wafer-scale and R2R Optical Scatterometry |
Juan Faria |
Steve Brueck |
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P-2A.2-T |
Wafer-scale and R2R Optical Imaging Interferometric Microscopy |
Preyom Dey |
Steve Brueck |
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P-2A.3-S |
Large Area Photonic Device Functional Nanometrology |
Brian Gawlik |
S.V. Sreenivasan |
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P-2A.4-T |
Metrology of Nanostructured Patterns using Liquid Drop Dynamics |
Xuemei Wang |
Steve Brueck |
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Thrust Project No. P-2D: Particle Diagnostics and Mitigation for Yield Enhancement |
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Related Testbed(s): R2R and WS Nanosculpting |
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P-2D.1-S |
Adaptive wafer chucks for minimizing backside particle hotspots |
Paras Ajay |
S.V. Sreenivasan |